Customizable EUV and DUV Photodiodes for Next-Generation Applications

Full Article —->Opto Diodes Custom EUV and DUV 

At the cutting edge of semiconductor lithography, scientific research, and advanced instrumentation, precision detection of deep ultraviolet (DUV) and extreme ultraviolet (EUV) wavelengths is critical. Opto Diode Corporation’s AXUV and SXUV series photodiodes are designed to meet these challenges with highly customizable solutions that deliver both accuracy and reliability.

Tailored for Precision

Unlike off-the-shelf detectors, our EUV and DUV devices can be configured to meet exact system requirements. Engineers can customize:

• Active area sizes and geometries, from compact sensors to large 10 mm × 10 mm regions

• Spectral responsivity tuning, using precision thin-film filters

• Electrical characteristics such as capacitance, rise time, and fall time

• Integrated amplification, with first-stage signal conditioning built into the device

This level of customization ensures optimal performance across a wide range of applications, from 13.5 nm EUV lithography to 1–190 nm soft X-ray detection.

Application Areas

Opto Diode’s EUV and DUV photodiodes are trusted worldwide in demanding environments, including:

• Semiconductor lithography – power monitoring at 13.5 nm for next-gen chipmaking

• Soft X-ray metrology – precision measurements from 1–80 nm

• CD-SEM – supporting nanometer-scale imaging and process control

• Spaceborne UV detection – engineered for durability in vacuum and cleanroom environments

Engineering for Reliability

Built on over four decades of photodiode expertise, these devices are manufactured in the U.S. with ITAR-compliant production. Each detector is housed in sealed, low-outgassing packages suitable for vacuum integration and long-term stability. By incorporating optical filtering and signal conditioning directly into the detector, Opto Diode reduces the need for external components — simplifying system design while improving measurement accuracy.

Featured Products

• SXUV100TF135 – Photodiode with integrated EUV filter (12–18 nm), 0.09 A/W @ 13.5 nm

• SXUV20HS1 – High-speed EUV photodetector covering 1–190 nm

• AXUV100TF400 – Large-area detector with integrated filter, optimized for 18–80 nm

• AXUVPS7 – Quadrant electron backscatter detector with responsivity from 0.0124 to 190 nm

Conclusion

From semiconductor fabs to space research labs, Opto Diode’s AXUV and SXUV photodiodes provide the flexibility and precision required to advance the world’s most demanding technologies. With customizable geometries, integrated filters, and optional amplification, these detectors deliver high reliability and performance where it matters most.

To learn more about Opto Diode’s customizable EUV and DUV photodiodes, Contact Sales@optodiode.com