The AXUV16ELG 16-element photodiode array (part number ODD-AXU-023) is built by Opto Diode, a division of ITW, for electron detection and position-sensitive measurement. Sixteen individually contacted silicon elements share one substrate in a 40-pin dual-in-line package across a 2 mm × 5 mm (10 mm²) active area, so a beam can be resolved across the array instead of collapsing into one lumped current. Opto Diode lists it as a “16 Element Photodiode Array Ideal for Electron Detection”.

Datasheet: AXUV16ELG datasheet (PDF), Revision October 10, 2024 — electron-response and photon-responsivity curves, capacitance and dark current vs. voltage, package drawing and the pin-description table. An earlier copy of the same specifications is also hosted at optodiode.com/pdf/AXUV16ELG.pdf.

What a 16-element array does that a single diode cannot

A single-element detector reports one quantity: total current. The AXUV16ELG splits that measurement into sixteen channels. Every element has its own cathode connections and all share a common anode, so each channel is amplified and read separately. Comparing the sixteen readings shows where along the array the signal lands and how it is distributed — the basis of position and profile measurement in electron detection. Shunt resistance is specified per element, the figure that matters when sizing a transimpedance amplifier for one channel.

The array uses the AXUV process, specified for photons, electrons or X-rays from 0.0124 nm to 190 nm and energies of 100 eV to 50 keV, with 100% internal quantum efficiency and windowless construction for enhanced response below 200 nm. The AXUV operating principles page explains the physics behind those figures.

Electro-optical characteristics at 25 °C

Parameter Test conditions Min Typ Max Units
Active area 2 mm × 5 mm — 10 — mm²
Responsivity See graphs in the datasheet — — — A/W
Reverse breakdown voltage, VR IR = 1 µA — 25 — V
Capacitance, C VR = 0 V — 700 2000 pF
Rise time VR = 0 V — 500 — nsec
Shunt resistance (per element) Vf = ±10 mV 100 — — MΩ

Responsivity is published as curves, not a single figure — typical electron response vs. energy, typical EUV-UV photon response, and typical UV-VIS-NIR photon responsivity. Read your value off those datasheet graphs.

Temperature ratings

Storage & operating range Rating
Ambient −10 °C to 40 °C
Nitrogen or vacuum −20 °C to 80 °C
Lead soldering temperature 260 °C (0.080″ from case, 10 seconds)

Exceeding these limits can create oxide growth on the active area, compromising responsivity to low-energy radiation and to wavelengths below 150 nm over time.

Handling note: the AXUV16ELG ships with a temporary cover plate protecting the photodiode array and its wire bonds. Review the application note Handling Precautions for AXUV, SXUV, and UVG Detectors before removing the cover.

Package and pin-out

Item Detail
Package 40-pin dual-in-line, with protective cover plate
Body size 2.095″ × 0.595″ (53.21 mm × 15.11 mm)
Pin pitch 0.100″ (2.54 mm)
Common anode Pins 1, 2, 19, 20, 21, 22, 39, 40
Element cathodes Two pins per element (element 1 on pins 3 and 38; element 16 on pins 18 and 23)

The pin-description table and dimensioned package drawing are on page 4 of the datasheet. Confirm the complete element-by-element pin assignment against that drawing, or with Opto Diode, before committing a board layout.

Where the AXUV16ELG is used

  • Electron detection — the application Opto Diode lists for this part, with sixteen channels of spatial detail
  • Electron reticle inspection — semiconductor mask and reticle work
  • Synchrotron radiation monitoring — beamline measurement across the AXUV range

Still choosing a family? The AXUV vs SXUV selection guide compares them directly, and how to choose a photodetector covers active area, speed and packaging trade-offs.

Related AXUV detectors

Model Part number Description Active area
AXUV16ELG ODD-AXU-023 16 element array, electron detection (this page) 10 mm²
AXUV20ELG ODD-AXU-033 20 element array, electron detection 3 mm²
AXUVPS7 ODD-AXU-096 Quad photodiode, electron detection 36.5 mm²
AXUV100G ODD-AXU-010 Large single-element photodiode, radiation detection 100 mm²
AXUV20HS1 ODD-AXU-036 High-speed circular photodiode, radiation detection 20 mm²

Browse the full AXUV photodiode range.

Frequently Asked Questions

What is the active area of the AXUV16ELG?

The datasheet specifies 2 mm × 5 mm, 10 mm² typical, and the AXUV product listing shows the same 10 mm². That is the array total; the datasheet does not break out per-element dimensions.

Why use a 16-element array instead of a single photodiode?

Each of the sixteen elements is read out on its own cathode pins against a common anode, so the array reports how the incident beam is distributed across the active area rather than as one combined current — position and profile information a single-element detector cannot produce.

What responsivity should I expect from the AXUV16ELG?

The datasheet gives responsivity as graphs, not as a single number. It plots typical electron response against energy, typical EUV-UV photon response, and typical UV-VIS-NIR photon responsivity, so read the value for your energy or wavelength from those curves.

Is the 100 megohm shunt resistance per element or for the whole array?

Per element. The datasheet specifies a minimum of 100 megohms for each of the sixteen elements at a forward voltage of ±10 mV. The other electro-optical figures are listed without a per-element note.

Request a quote or a custom configuration

For pricing, lead time, stock, or a custom active area or package, contact the Opto Diode team — the standard response time for an online request is within 1–2 business days. You can also download the full product catalog. Opto Diode manufactures in Camarillo, California, on its own wafer fabrication line, ISO 9001:2015 certified and ITAR registered; direct orders carry a $3,000 minimum.

Specifications from the AXUV16ELG datasheet, Revision October 10, 2024. Reviewed and updated July 2026.