The AXUV100G (part number ODD-AXU-010) is a large-area silicon photodiode from Opto Diode, a division of ITW, manufactured in Camarillo, California and built for electron and X-ray detection. Its datasheet is titled Electron Detection 100 mm², and a single 10 mm × 10 mm active area gives it 100 mm² of collection area. It belongs to the AXUV family, which measures photons, electrons, or X-rays from 0.0124 nm to 190 nm and detects energy from 100 eV to 50 keV with 100% internal quantum efficiency. Of the three 100 mm² parts in the AXUV line, the AXUV100G is the unfiltered one.
Datasheet: AXUV100G datasheet (PDF), Revision October 10, 2024 — the current controlled document. It contains the electron-response and photon-responsivity curves, capacitance vs. voltage, dark current vs. voltage, and the package drawing. An earlier copy (Revision December 17, 2022) also remains online; the specifications on this page follow the October 2024 revision.
Electro-optical characteristics at 25 °C
| Parameter | Test conditions | Min | Typ | Max | Units |
|---|---|---|---|---|---|
| Active area | 10 mm x 10 mm | — | 100 | — | mm² |
| Responsivity | See responsivity graphs in datasheet | 0.07 | 0.08 | 0.09 | A/W |
| Shunt resistance, Rsh | V = ±10 mV | 20 | — | — | MΩ |
| Capacitance, C | VR = 0 V | — | 5 | 15 | nF |
| Rise time | VR = 0 V, RL = 50 Ω | — | — | 10 | µs |
Reading the responsivity figure. The AXUV100G carries a numeric responsivity spec — 0.08 A/W typical, with a 0.07 A/W minimum and 0.09 A/W maximum — but the datasheet gives its test condition as the responsivity graph rather than a single wavelength or beam energy. Treat it as a production limit, not the response to expect everywhere in the band. Three curves carry the real behaviour: typical electron response plotted against energy, typical EUV-UV photon response from 0 to 250 nm, and typical UV-VIS-NIR photon responsivity from 200 to 1100 nm. Read the value for your own wavelength or beam energy off those plots.
A note on the active area. The active area is 100 mm², a single 10 mm × 10 mm element — dimensioned as .395 in [10.03 mm] square in the package drawing, and listed as 100 mm² on the AXUV product listing. If you are working from the older December 2022 copy of the datasheet, note that its test-conditions cell printed “100 mm x 100 mm”; that was corrected in the October 2024 revision.
Temperature ratings
| Storage & operating range | Rating |
|---|---|
| Ambient | -10 °C to 40 °C |
| Nitrogen or vacuum | -20 °C to 80 °C |
| Lead soldering temperature | 260 °C (0.080 in from case, 10 seconds) |
These are not soft limits. The datasheet warns that exceeding them may create oxide growth on the active area, and that over time responsivity to low energy radiation and to wavelengths below 150 nm will be compromised — precisely where an AXUV detector earns its keep. Check bake-out and vacuum processing temperatures against the table above.
Handling note: the AXUV100G ships with a temporary cover protecting the photodiode array and its wire bonds. Review the application note Handling Precautions for AXUV, SXUV, and UVG Detectors before removing the cover.
Key features
- Large detection area — a single 100 mm² element
- Vacuum compatible
- Supplied with a protective cover plate
- Windowless AXUV construction, for enhanced response below 200 nm
- 100% internal quantum efficiency across the AXUV family — see how AXUV photodiodes work
Where the AXUV100G is used
- Electron detection — the application the datasheet is titled for
- X-ray detection — also listed on the datasheet
- Synchrotron radiation monitoring — an AXUV family application
- Electron reticle inspection — an AXUV family application
Deciding between detector families? The AXUV vs SXUV selection guide compares them directly, and the radiation-hardened SXUV100 is the 100 mm² counterpart built to hold its response after EUV and UV exposure. Where position or profile matters rather than total flux, the AXUV16ELG splits the same AXUV process into sixteen separately read elements. See also how to choose a photodetector and the EUV 13.5 nm power & dose monitoring guide.
Related AXUV detectors
| Model | Part number | Description | Active area |
|---|---|---|---|
| AXUV100G | ODD-AXU-010 | Large photodiode ideal for radiation detection (this page) | 100 mm² |
| AXUV100TF030 | ODD-AXU-019 | Photodiode with integrated filter | 100 mm² |
| AXUV100TF400 | ODD-AXU-002 | Photodiode with integrated filter | 100 mm² |
| AXUV300C | ODD-AXU-082 | Large rectangular photodiode ideal for radiation detection | 331 mm² |
| AXUV576C | ODD-AXU-048 | Large square photodiode ideal for radiation detection | 576.5 mm² |
| AXUV100CS | 507-065 | Photodiode socket, 2 pin, 12.5 mm spacing | N/A |
| AXUV20HS1 | ODD-AXU-036 | High-speed circular photodiode, radiation detection | 20 mm² |
Browse the full AXUV photodiode range.
Frequently Asked Questions
What is the active area of the AXUV100G?
100 mm², formed by a single 10 mm × 10 mm element. The package drawing dimensions it as .395 in [10.03 mm] square, and the AXUV product-category listing gives the active area as 100 mm².
What is the responsivity of the AXUV100G?
The datasheet specifies 0.08 A/W typical, 0.07 A/W minimum and 0.09 A/W maximum. Its stated test condition is the responsivity graph rather than a single wavelength or energy, so use the electron-response and photon-response curves in the datasheet to read the value at your own wavelength or beam energy.
Why does the AXUV100G ship with a cover plate?
It ships with a temporary cover protecting the photodiode array and the wire bonds. Opto Diode asks that you review the application note on handling precautions for AXUV, SXUV, and UVG detectors before removing it.
What temperatures can the AXUV100G tolerate?
-10 °C to 40 °C in ambient conditions and -20 °C to 80 °C in nitrogen or vacuum, with a lead soldering limit of 260 °C applied 0.080 in from the case for 10 seconds. Exceeding these temperatures may create oxide growth on the active area, which over time compromises responsivity to low energy radiation and to wavelengths below 150 nm.
Request a quote or a custom configuration
For pricing, lead time, stock, or a custom active area or package, contact the Opto Diode team — the standard response time for an online request is within 1-2 business days. Direct orders must meet a $3,000 minimum. You can also download the full product catalog.
Specifications from the AXUV100G datasheet, Revision October 10, 2024. Reviewed and updated July 2026.