The SXUV100 (part number ODD-SXU-001) is a large-area silicon photodiode from Opto Diode, a division of ITW, designed for extreme-ultraviolet and soft X-ray detection from 1 nm to 190 nm. Its defining property is stability: the SXUV process holds its response after exposure to EUV and UV conditions, which is why these detectors are used for dose and power monitoring in EUV lithography and beamline instrumentation. The 10 mm × 10 mm active area makes it the choice when a large collection area matters.
Datasheet: SXUV100 datasheet (PDF) — includes the photon-responsivity curve, capacitance vs. voltage, dark current vs. voltage, and package drawings.
Electro-optical characteristics at 25 °C
| Parameter | Test conditions | Min | Typ | Max | Units |
|---|---|---|---|---|---|
| Active area | 10 mm × 10 mm | — | 100 | — | mm² |
| Shunt resistance, Rsh | @ ±10 mV | 10 | — | — | MΩ |
| Capacitance, C | VR = 0 V | — | 5 | 15 | nF |
| Response time, tr | RL = 50 Ω, VR = 8 V | — | — | 6 | µs |
Responsivity varies considerably across the 1–190 nm band and is specified as a curve rather than a single figure — see the typical photon-responsivity plot in the datasheet.
Temperature ratings
| Storage & operating range | Rating |
|---|---|
| Ambient | −10 °C to 40 °C |
| Nitrogen or vacuum | −20 °C to 80 °C |
| Lead soldering temperature | 260 °C (0.080″ from case, 10 seconds) |
Handling note: the SXUV100 ships with a temporary cover plate protecting the photodiode and its wire bonds. Review the application note Handling Precautions for AXUV, SXUV, and UVG Detectors before removing the cover.
Key features
- Single active area — 100 mm² (10 mm × 10 mm)
- Detection to 1 nm
- Stable response after exposure to EUV/UV conditions
- Supplied with a protective cover plate
Where the SXUV100 is used
- EUV lithography — source power and dose monitoring at 13.5 nm
- Synchrotron and beamline metrology — large-area flux capture
- X-ray spectroscopy — soft X-ray measurement
For a deeper look at how these detectors are deployed, see the EUV 13.5 nm power & dose monitoring guide. Deciding between detector families? The AXUV vs SXUV selection guide compares them directly, and the AXUV100G is the AXUV-family counterpart at the same 100 mm² active area.
Related SXUV detectors
| Model | Part number | Description | Active area |
|---|---|---|---|
| SXUV100 | ODD-SXU-001 | Large EUV photodetector (this page) | 100 mm² |
| SXUV100TF135 | SXUV100TF135DS | Photodiode with integrated thin-film filter for 13.5 nm | 100 mm² |
| SXUV20C | ODD-SXU-051 | EUV low-noise photodetector | 20 mm² |
| SXUV300C | ODD-SXU-044 | Large EUV high-speed ceramic package photodetector | 331 mm² |
Browse the full SXUV EUV photodiode range.
Frequently Asked Questions
What wavelength range does the SXUV100 cover?
1 nm to 190 nm — spanning soft X-ray through the extreme and vacuum ultraviolet. The datasheet specifies detection to 1 nm.
What is the active area of the SXUV100?
100 mm², formed by a single 10 mm × 10 mm active area — the largest active area in the standard SXUV line apart from the 331 mm² SXUV300C, shared with the filtered SXUV100TF135.
Why choose SXUV over AXUV?
SXUV is the radiation-hardened family, engineered to hold its response after exposure to EUV and UV conditions. AXUV is optimised instead for windowless broadband response and absolute, calibration-grade measurement.
Can Opto Diode supply a filtered or custom version?
Yes. The SXUV100TF135 adds an integrated thin-film filter tuned for 13.5 nm, and custom active areas, coatings, and packaging are available — Opto Diode manufactures these in the United States.
Request a quote or a custom configuration
For pricing, lead time, stock, or a custom active area, window, or package, contact the Opto Diode team — the standard response time for an online request is within 1–2 business days. You can also download the full product catalog.
Specifications from the SXUV100 datasheet, Revision October 10, 2024. Reviewed and updated July 2026.