Custom EUV Filters and Optical Coatings: Precision Solutions for Extreme Wavelengths

In industries where precision, reliability, and innovation define success, Opto Diode Corporation stands as a leader in custom EUV (extreme ultraviolet) filters and thin-film optical coatings. Designed for applications that demand exacting spectral performance, our filters and coatings deliver unmatched control for semiconductor lithography, soft X-ray metrology, defense, biomedical, and industrial sensing systems.

What Are Custom EUV Filters?

Our EUV filters use advanced thin-film coatings to target specific extreme wavelengths—most notably 13.5 nm for semiconductor lithography and 1–80 nm for soft X-ray applications. These filters are engineered to:

• Deliver high transmission within the desired wavelength band

• Block out-of-band light to reduce noise and improve system accuracy

• Integrate seamlessly with EUV photodiodes or function as standalone components for lithography, metrology, and research systems.

By combining multiple materials such as sapphire, germanium, silicon, and calcium fluoride (CaF₂) with precision coatings, Opto Diode tailors every filter to the specific requirements of your application.

Why Opto Diode Filters Stand Out

• Broad Spectral Coverage: Our custom coatings span from EUV and soft X-ray through visible and deep infrared, enabling solutions for diverse industries.

• U.S.-Based Manufacturing: With our California wafer fabrication facility and thin-film coating lab, we provide ITAR-compliant, hermetically sealed components built to survive the harshest environments.

• Application-Specific Designs: Whether for EUV lithography power monitoring, infrared gas sensing, or multi-wavelength biomedical detection, our filters are precision-engineered to enhance sensitivity and optimize performance.

Applications of Custom Coatings & Filters

Opto Diode’s optical coatings and filters empower mission-critical technologies across:

• Semiconductor lithography and soft X-ray metrology – ensuring precision in chip manufacturing.

• Night vision and infrared illumination for defense and aerospace.

• Biomedical and analytical instrumentation for diagnostics and life sciences.

• Environmental and industrial sensors that require long-term optical stability and performance.

Partner with Opto Diode

With more than four decades of photonics expertise and the backing of ITW (Illinois Tool Works), Opto Diode is the trusted choice for organizations needing custom EUV filters and optical solutions that meet the highest performance and reliability standards.

For more information about our custom EUV filters, photodiodes, and full-spectrum optical solutions, visit www.optodiode.com or contact our team for a tailored consultation.