High-Performance Photodetectors for Advanced Microscopy
Opto Diode’s AXUV series photodiodes are built for the demands of advanced microscopy — electron microscopy, synchrotron instrumentation, and materials analysis. Windowless (or thin-entrance) construction with 100% internal quantum efficiency gives them high sensitivity and low dark current from the soft X-ray region through the vacuum ultraviolet, 0.0124 nm to 190 nm, so they capture accurate signal even under high-energy and vacuum conditions.
Detectors for microscopy: AXUV detectors for backscattered-electron (BSE) and electron/X-ray detection in SEM, and silicon photodiodes for precision light sensing.
Why AXUV detectors suit electron microscopy
In scanning electron microscopy (SEM), AXUV detectors are used for backscattered-electron detection and beam position sensing, where image contrast and measurement accuracy depend on the detector’s response. Their thin or windowless entrance and 100% internal quantum efficiency collect charge efficiently with minimal signal loss — the property that matters most for high-resolution imaging and surface characterization. Across the family, the detectors deliver strong linearity, low dark current, and high sensitivity over a broad spectral range.
Built for high-vacuum, high-energy environments
Every AXUV detector is designed to run reliably in high-vacuum and high-energy conditions typical of scientific and industrial instruments. Models are available in compact, windowless packaging that maximizes transmission and eases integration across microscopy platforms. All detectors are manufactured and tested in the USA for consistent quality and long-term stability.
Customizable for specialized research
Beyond the standard catalog, Opto Diode builds customized detector layouts — segmented designs for spatial sensitivity, circular apertures, and specialized packaging — to integrate into electron spectrometers, synchrotron beamlines, and vacuum instrumentation. That lets a research team tune the detector to a specific experiment rather than design around a fixed part.
Featured AXUV series models
| Model | Active Area (mm²) | Spectral Range | Notable feature |
|---|---|---|---|
| AXUV20HS1 | 20 | 0.0124–190 nm | High-speed, compact |
| AXUV63HS1 | 63 | 0.0124–190 nm | High-speed circular, radiation detection |
| AXUV100G | 100 | 0.0124–190 nm | Large area, radiation detection |
| AXUV100TF030 | 100 | Filtered (soft X-ray) | Integrated thin-film filter |
See the full specifications, responsivity curves, and datasheets on the AXUV product page, or use the photodetector selection guide to match a detector to your instrument.
Key features at a glance
- Fast response time
- Low noise for high-precision measurements
- Compact, durable, and available windowless
- Broad detection range: 0.0124–190 nm (soft X-ray through VUV)
Applications
- Scanning electron microscopy (SEM) — backscattered-electron detection and beam position sensing
- Synchrotron & beamline instrumentation
- Surface science & materials research
Frequently Asked Questions
What spectral range do AXUV detectors cover?
AXUV silicon photodiodes respond from 0.0124 nm to 190 nm — spanning soft X-rays, the extreme ultraviolet, and the vacuum ultraviolet — which is why they suit electron microscopy, synchrotron, and materials work.
Why use AXUV detectors for backscattered-electron detection in SEM?
Their thin or windowless entrance and 100% internal quantum efficiency collect charge efficiently with minimal loss, giving the clean, linear signal needed for accurate image contrast and beam position sensing in SEM.
Can AXUV detectors operate in high vacuum?
Yes. They are designed for high-vacuum, high-energy environments and are available in compact windowless packages that maximize transmission for beamline and vacuum-chamber integration.
Can Opto Diode customize a detector for my instrument?
Yes. Beyond standard models, Opto Diode offers segmented layouts for spatial sensitivity, circular apertures, and specialized packaging for electron spectrometers, synchrotron beamlines, and vacuum instrumentation.
Why choose Opto Diode for microscopy detectors
Opto Diode, a division of ITW (Illinois Tool Works), pairs precision silicon photodiode manufacturing with decades of photonics experience, all built and tested in the USA. For electron microscopy, beamline alignment, or surface metrology, the AXUV series gives research teams a dependable, calibration-grade detector. To specify a detector or request a custom configuration, contact our team or download the product catalog.
Reviewed and updated July 2026.
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