

SXUV High-Energy Photon, Electron, and X-Ray Detection
Opto Diode’s SXUV series photodiodes are engineered for precise detection of extreme ultraviolet (EUV) radiation, X-rays, and electrons. Featuring a large 20 mm² circular active area, these detectors offer superior responsivity in the 1 nm to 200 nm wavelength range, making them ideal for high-intensity EUV applications.
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SXUV Detectors Featuring High Radiation Hardness and Stable EUV Responsivity
Features
- High Radiation Hardness
- Low Noise Performance
- Broad Spectral Responsivity
Applications
- EUV Lithography
- X-ray Spectroscopy
- Synchrotron Radiation Monitoring
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Our Available Products
Model Name/Number |
Part Number |
Description |
Active Area (mm2) |
Certification and Compliance |
Product Resources |
---|---|---|---|---|---|
![]() SXUV100 |
ODD-SXU-001 |
Single Active Area |
100 |
||
![]() SXUV100TF135 |
SXUV100TF135DS |
100 mm2 Square Active Area |
100 |
||
![]() SXUV300C |
ODD-SXU-044 |
Rectangular Active Area |
331 |
||
![]() SXUVPS4C |
ODD-SXU-023 |
TO-5, 5 Pin Package |
1.25 |
||
![]() SXUVPS4 |
ODD-SXU-013 |
Circular Active Area (4 Quadrants) |
1.25 |
||
![]() SXUV5 |
ODD-SXU-008 |
TO-5 package |
5 |
||
![]() SXUV20C |
ODD-SXU-051 |
TO-8 package |
20 |
||
![]() SXUV20HS1 |
ODD-SXU-004 |
Circular Active Area |
20 |
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