SXUV High-Energy Photon, Electron, and X-Ray Detection

​Opto Diode’s SXUV series photodiodes are engineered for precise detection of extreme ultraviolet (EUV) radiation, X-rays, and electrons. Featuring a large 20 mm² circular active area, these detectors offer superior responsivity in the 1 nm to 200 nm wavelength range, making them ideal for high-intensity EUV applications.

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SXUV Detectors Featuring High Radiation Hardness and Stable EUV Responsivity

Features

  • High Radiation Hardness
  • Low Noise Performance
  • Broad Spectral Responsivity

Applications

  • EUV Lithography
  • X-ray Spectroscopy
  • Synchrotron Radiation Monitoring

Our Available Products

Model Name/Number
Part Number
Description
Active
Area (mm2)
Certification
and Compliance
Product Resources
SXUVPS4

SXUVPS4

ODD-SXU-013

Circular Active Area (4 Quadrants)

1.25

SXUVPS4C

SXUVPS4C

ODD-SXU-023

Quadrant UV Enhanced Photodiode

1.25

SXUV5

SXUV5

ODD-SXU-008

High Speed EUV Photodetector (1nm-190nm)

5

SXUV20HS1

SXUV20HS1

ODD-SXU-004

High Speed EUV Photodetector (1nm-190nm)

20

SXUV20C

SXUV20C

ODD-SXU-051

EUV Low Noise Photodetector (1nm-190nm)

20

SXUV100

SXUV100

ODD-SXU-001

Large EUV Photodetector (1nm-190nm)

100

SXUV100TF135

SXUV100TF135

SXUV100TF135DS

Photodiode with Integrated Filter

100

SXUV300C

SXUV300C

ODD-SXU-044

Large EUV High Speed Ceramic Package Photodetector (1nm-190nm)

331

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