

SXUV High-Energy Photon, Electron, and X-Ray Detection
Opto Diode’s SXUV series photodiodes are engineered for precise detection of extreme ultraviolet (EUV) radiation, X-rays, and electrons. Featuring a large 20 mm² circular active area, these detectors offer superior responsivity in the 1 nm to 200 nm wavelength range, making them ideal for high-intensity EUV applications.
Download Certificates:
SXUV Detectors Featuring High Radiation Hardness and Stable EUV Responsivity
Features
- High Radiation Hardness
- Low Noise Performance
- Broad Spectral Responsivity
Applications
- EUV Lithography
- X-ray Spectroscopy
- Synchrotron Radiation Monitoring
Our Available Products
Model Name/Number |
Part Number |
Description |
Active Area (mm2) |
Certification and Compliance |
Product Resources |
---|---|---|---|---|---|
SXUVPS4 |
ODD-SXU-013 |
Circular Active Area (4 Quadrants) |
1.25 |
||
SXUVPS4C |
ODD-SXU-023 |
Quadrant UV Enhanced Photodiode |
1.25 |
||
SXUV5 |
ODD-SXU-008 |
High Speed EUV Photodetector (1nm-190nm) |
5 |
||
SXUV20HS1 |
ODD-SXU-004 |
High Speed EUV Photodetector (1nm-190nm) |
20 |
||
SXUV20C |
ODD-SXU-051 |
EUV Low Noise Photodetector (1nm-190nm) |
20 |
||
SXUV100 |
ODD-SXU-001 |
Large EUV Photodetector (1nm-190nm) |
100 |
||
SXUV100TF135 |
SXUV100TF135DS |
Photodiode with Integrated Filter |
100 |
||
SXUV300C |
ODD-SXU-044 |
Large EUV High Speed Ceramic Package Photodetector (1nm-190nm) |
331 |
Get a Quotation Now
For any queries, please complete the form and we
will contact you within 48 hours